Method of making coherent multilayer crystals

Details Method of making coherent multilayer crystals Method of making coherent multilayer crystals

1982-09-27

1984-02-07

Andrews, M. J.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204192S, C23C 1500

Patent

active

044301839

ABSTRACT:
A new material consisting of a coherent multilayer crystal of two or more elements where each layer is composed of a single element. Each layer may vary in thickness from about 2 .ANG. to 2500 .ANG.. The multilayer crystals are prepared by sputter deposition under conditions which slow the sputtered atoms to near substrate temperatures before they contact the substrate.

REFERENCES:
patent: 3856647 (1974-12-01), Blachman
patent: 4093349 (1978-06-01), Mills

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