Method of making cathode targets comprising silicon

Details Method of making cathode targets comprising silicon Method of making cathode targets comprising silicon

1993-04-02

1999-10-12

Zimmerman, John J.

Stock material or miscellaneous articles

All metal or with adjacent metals

Composite; i.e., plural, adjacent, spatially distinct metal...

428937, 228208, 2281231, 20429813, B32B 1504, C23C 1416

Patent

active

059652780

ABSTRACT:
A method for bonding silicon-containing compositions to metal surfaces is disclosed wherein a coarse silicon-containing surface is arc-sprayed with a first adhesive layer, a second solderable layer, and a third solder layer, and the arc-sprayed surface is then soldered to the metal surface. The method is particularly useful for producing silicon-containing targets for cathode sputtering.

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