Method of making capacitive pressure sensors

Details Method of making capacitive pressure sensors Method of making capacitive pressure sensors

1988-08-03

1990-03-20

Hall, Carl E.

Metal working

Electric condenser making

73724, 361278, 361279, 361283, 427 81, H01G 502

Patent

active

049089218

ABSTRACT:
A method of batch producing capacitive pressure sensors in which a sheet of semiconductive material is provided with an insulating layer 4 on one side thereof and a plurality of cavities 1 are formed in the semiconductive sheet by removing part of the insulating layer and part of the semiconductive sheet. Simultaneously with producing the cavities in the semiconductive sheet, at least one recess is provided, again by removing part of the insulating layer and part of the semiconductive sheet. The semiconductive sheet is then bonded to a non-conductive substrate 3 to form a composite sheet with the insulating layer 4 in contact with the substrate, the substrate being provided with a number of electrodes 5 corresponding to the number of cavities in the semiconductive sheet and arranged such that they are located within the cavities on bonding of the semiconductive sheet to the substrate, each electrode having an electrical feedthrough 6 extending therefrom and terminating at a point outside of the associated cavity but within an associated recess in the semiconductive sheet. The bonded composite sheet is patterned with a series of grid lines to delineate the plurality of pressure sensors and the semiconductive sheet is scored from the side opposite that provided with the insulating layer so as to break into each recess to reveal, at a stage in the method of production, the terminal end of each electrical feedthrough 6, and the bonded composite sheet is diced along the grid lines so as to separate the pressure sensors one from another.

REFERENCES:
patent: 3117365 (1964-01-01), Belko, Jr.
patent: 4184189 (1980-01-01), Davis et al.
patent: 4261086 (1981-04-01), Giachino et al.
patent: 4415948 (1983-11-01), Grantham et al.
patent: 4586109 (1986-04-01), Peters et al.

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