Method of making capacitance sensor

Details Method of making capacitance sensor Method of making capacitance sensor

2007-08-20

2010-10-05

Trinh, Minh (Department: 3729)

Metal working

Electric condenser making

C029S592100, C029S025350, C073S718000

Reexamination Certificate

active

07805821

ABSTRACT:
A method for manufacturing a capacitance sensor comprises the steps of (a) depositing a film to be a diaphragm forming a moving electrode, (b) heating the film to be the diaphragm to a first temperature, and (c) depositing a film to be a plate forming a fixed electrode opposing to the moving electrode. Stresses of the diaphragm and the plate of the capacitance sensor are optimized.

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