Method of making and separating semiconductor lasers

Details Method of making and separating semiconductor lasers Method of making and separating semiconductor lasers

1989-03-31

1989-11-28

Hearn, Brian E.

Fishing, trapping, and vermin destroying

148DIG95, 148DIG168, 372 50, 437 68, 437 78, 437227, H01L 2120, H01L 21302

Patent

active

048837717

ABSTRACT:
A method of producing a semiconductor laser which comprises sequentially depositing a lower cladding layer, an active layer, and an upper cladding layer on a substrate, forming a V shaped groove in the deposited layers at least reaching the lower cladding layer, the groove extending in a direction perpendicular to the direction between the surfaces that are to become resonator end surfaces, growing a semiconductor layer having a larger energy band gap than that of the active layer in the groove while retaining the V shaped groove, and cleaving the substrate and layers along the V shaped groove.

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