Method of making an organic thin film transistor

Details Method of making an organic thin film transistor Method of making an organic thin film transistor

1996-12-20

2000-08-22

Booth, Richard

Semiconductor device manufacturing: process

Having organic semiconductive component

438151, 438158, 438257, H01L 5140

Patent

active

06107117&

ABSTRACT:
A process for fabricating thin film transistors in which the active layer is an organic semiconducting material with a carrier mobility greater than 10.sup.-3 cm.sup.2 /Vs and a conductivity less than about 10.sup.-6 S/cm at 20.degree. C. is disclosed. The organic semiconducting material is a regioregular (3-alkylthiophene) polymer. The organic semiconducting films are formed by applying a solution of the regioregular polymer and a solvent over the substrate. The poly (3-alkylthiophene) films have a preferred orientation in which the thiophene chains has a planar stacking so the polymer backbone is generally parallel to the substrate surface.

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