Method of making an optical component by ion implantation

Details Method of making an optical component by ion implantation Method of making an optical component by ion implantation

1990-12-14

1992-12-29

Nguyen, Nam X.

Coating processes

Direct application of electrical, magnetic, wave, or...

Ion plating or implantation

427162, 427582, 427531, C23C 1400, B05D 500

Patent

active

051748762

ABSTRACT:
An optical electronic component, in which strip waveguides of limited depth and lateral width are formed in undoped dielectric substrate, e.g. an undoped crystal, by implantation of rare-earch ions or ions of transition metals, preferably laser-active ions with energies of 50 keV to 10 MeV.

REFERENCES:
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patent: 4787689 (1988-11-01), Korotky et al.
patent: 4840816 (1989-06-01), Appleton et al.
patent: 4886587 (1989-12-01), Miyawaki
patent: 4938836 (1990-07-01), Carenco et al.
Guide Wave Modulators in Ti Ion Implanted LiNbO.sub.3 Waveguides, Paul R. Ashley, et al, Journal May 5, 1989.
Erbium Implanted in III-V Materials, Rochaix et al, Japanese Journal of Applied Physics, vol. 27, Dec. 1988.
Fabrication of Low-Loss Optical Fibres Containing rare-Earch Ions, Poole et al, Jul. 15, 1985, UK.

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