Method of making an integrated component of the cold cathode typ

Details Method of making an integrated component of the cold cathode typ Method of making an integrated component of the cold cathode typ

1989-09-22

1991-01-22

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

4272555, 437 80, 437 64, 148DIG143, H01J 4012, H01J 1924

Patent

active

049867873

ABSTRACT:
The disclosed microcomponent has a surface oxidated type of Si substrate, at least one cathode with caesiated surface made of n type monocrystalline Si being formed on this substrate. It is surrounded by monocrystalline p tyep Si. A layer of SiO.sub.2, formed on the p type Si, has an aperture facing the cathode. This aperture is self-sealed by the anode material.

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patent: 3921022 (1875-11-01), Levine
patent: 4370797 (1983-02-01), van Gorkom et al.
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patent: 4683399 (1987-07-01), Soclof
patent: 4721885 (1988-01-01), Brodie
Patent Abstracts of Japan, vol. 12, No. 215 (E-623)(3062), Jun. 18, 1988; & JP-A-63 10 428, 01-18-88, A. Shimizu, "Cold Cathode Device".

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