Method of making an enhanced quality factor resonator

Details Method of making an enhanced quality factor resonator Method of making an enhanced quality factor resonator

1996-07-22

1999-03-23

Hall, Carl E.

Metal working

Piezoelectric device making

310311, 310324, H01L 4122

Patent

active

058843787

ABSTRACT:
A high quality factor resonator (15) including a substrate (110) and a resonator layer (150). The resonator layer includes a first electrode (157). The resonator layer (150) is disposed on a surface of the substrate (110). The first electrode (157) is disposed on a distal surface of the resonator layer (150). A cavity (120) is disposed between the substrate (110) and the resonator layer (150) and a second electrode (159) is disposed on the substrate (110) and on a surface of the cavity (120) remote from the resonator layer (150) and is separated from the resonator layer (150) by a thin gap.

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