Method of making an electrostatic silicon accelerometer

Details Method of making an electrostatic silicon accelerometer Method of making an electrostatic silicon accelerometer

1990-03-27

1991-04-09

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 63, 437927, 437974, 148DIG12, 73517AV, 73517R, 357 26, H01L 21302

Patent

active

050064878

ABSTRACT:
A solid state accelerometer having an all silicon sensor for measuring accelerational and gravitational forces. The accelerometer measuring system also has associated electronics that include an analog rebalance loop and a digitizer loop.

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patent: 4891985 (1990-01-01), Glenn
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J. B. Angell, S. C. Terry, P. W. Barth, "Silicon Micromechanical Devices", Scientific American, vol. 248, No. 4, Apr. 1983, pp. 44-55.

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