Method of making an electrostatic chuck with oxide insulator

Details Method of making an electrostatic chuck with oxide insulator Method of making an electrostatic chuck with oxide insulator

1993-12-20

1995-09-26

Bryant, David P.

Metal working

Method of mechanical manufacture

Electrical device making

29458, 29460, 295272, 295274, 29530, H01R 4300

Patent

active

054525101

ABSTRACT:
An electrostatic chuck and method of manufacture of the chuck in which the component parts are machined, then partially anodized to provide a hard insulating surface on surfaces that are not in contact with the wafer, and then assembled, after which the top surface abutting the workpiece is machined and a correction radius is cut to suppress discharges between the electrodes.

REFERENCES:
patent: 4645218 (1987-02-01), Ooshio et al.
patent: 5055964 (1991-10-01), Logan et al.
patent: 5099571 (1992-03-01), Logan et al.
patent: 5103367 (1992-04-01), Horwitz et al.
patent: 5166856 (1992-11-01), Liporace et al.
patent: 5184398 (1993-02-01), Moslehi
patent: 5213349 (1993-05-01), Elliot

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