Method of making an electrode tip for a tunnel current sensing d

Details Method of making an electrode tip for a tunnel current sensing d Method of making an electrode tip for a tunnel current sensing d

1992-12-08

1995-04-18

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

156628, 156649, 437901, H01L 21306

Patent

active

054078687

ABSTRACT:
A method for selectively etching a semiconductor wafer in the presence of an electrochemical etchant wherein the electrical potential of the area that is selectively etched is automatically changed to a potential at which the etching is inhibited once the desired etching in the area is completed. The method is described with respect to making an electrode tip for a tunnel current sensing device.

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