Stock material or miscellaneous articles – Structurally defined web or sheet – Including variation in thickness
Patent
1988-03-03
1989-03-07
Powell, William A.
Stock material or miscellaneous articles
Structurally defined web or sheet
Including variation in thickness
156647, 156651, 156654, 156657, 1566611, 156662, 350 9615, 350 9621, H01L 21306, B44C 122
Patent
active
048105570
ABSTRACT:
Tandem grooves (or other groove-like features) with controlled transition between the narrow and wide portion of the groove can be formed in a (100) Si surface by a method that comprises patterning a first masking layer such that the resulting aperture in the masking layer defines the tandem groove, recovering the narrow part of the aperture with a second masking layer, subjecting the wide portion of the aperture to an initial etch, removing the second masking layer from the narrow part of the aperture, and subjecting the aperture to a further etch such that both the wide and the narrow portions of the tandem V-groove are completed. The inventive method is advantageously used to produce grooves that allow attachment of a coated optical fiber to a Si substrate.
REFERENCES:
patent: 3506509 (1967-11-01), Kragness et al.
patent: 3765969 (1973-10-01), Kragness et al.
patent: 3864018 (1975-02-01), Miller
The Bell System Technical Journal, vol. 57, No. 1, Jan. 1978, "Fiber-Optic Array Splicing with Etched Silicon Chips" by C. M. Miller, pp. 75-90.
The Bell System Technical Journal, vol. 57, No. 1, Jan. 1978, "Accurate Silicon Spacer Chips for an Optical-Fiber Cable Connector" by C. M. Schroeder, pp. 91-97.
Journal of Lightwave Technology, vol. LT-5, No. 12, Dec. 1987, "Single-Mode Optical Fiber Connection to High-Silica Waveguide with Fiber Guiding Groove" by Y. Yamada et al., pp. 1716-1720.
IEEE Transactions on Electron Devices, vol. ED-25, No. 10, Oct. 1978, "Anisotropic Etching of Silicon" by K. E. Bean, pp. 1185-1193.
Proceedings of the IEEE, vol. 70, No. 5, May 1982, "Silicon as a Mechanical Material" by K. E. Peterson, pp. 420-457.
American Telephone and Telegraph Company AT&T Bell Laboratories
Pacher Eugen E.
Powell William A.
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