Chemistry of inorganic compounds – Silicon or compound thereof – Oxygen containing
Patent
1977-06-17
1978-09-26
Arnold, Donald J.
Chemistry of inorganic compounds
Silicon or compound thereof
Oxygen containing
51308, C01B 3312, C01B 3318
Patent
active
041170938
ABSTRACT:
Amorphous silicon dioxide particles for polishing semiconductor surfaces are prepared by boiling, at reflux, a mixture of surplus organic amine, a hydroxybenzene, water and silicon in the presence of oxygen to precipitate silicon dioxide.
REFERENCES:
patent: 2744001 (1956-05-01), Harman et al.
patent: 2865782 (1958-12-01), Strassburg
patent: 3208823 (1965-09-01), Baker et al.
patent: 3715842 (1973-02-01), Treddinick et al.
patent: 3922393 (1975-11-01), Sears
Brunner Friedrich Christian
Schwerdt Friedrich Wilhelm
Steinbeck Hans-Heinz
Arnold Donald J.
Bunnell David M.
International Business Machines - Corporation
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