Method of making an aligned electrode on a semiconductor...

Details Method of making an aligned electrode on a semiconductor... Method of making an aligned electrode on a semiconductor...

2005-09-20

2005-09-20

Chaudhuri, Olik (Department: 2823)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Mesa formation

C438S605000

Reexamination Certificate

active

06946313

ABSTRACT:
A method of making an electrode on a semiconductor device including depositing metal on a top surface of a semiconductor structure, and defining a first region of the semiconductor structure for a first electrode by forming a mask over the metal. The mask has an opening so that the first region is covered by the mask and a second region of the structure is aligned with the opening in the mask. Metal aligned with the opening in the mask in the second region is then removed to form a first electrode overlying the first region of the semiconductor structure, and also revealing the top surface of the semiconductor structure in the second region. Material is then removed from the semiconductor structure aligned with opening in the second region to form a second electrode surface for a second electrode.

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