Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Insulative housing or support
Patent
1996-02-20
1998-09-01
Chaudhuri, Olik
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
Insulative housing or support
438118, 438126, 438121, H01L 2160
Patent
active
058010742
ABSTRACT:
A method of making an assembly package having an airtight cavity for housing an electrical element, such as a semiconductor chip. The method includes bonding a shell to a conductive base with a thermally setting alpha-staged epoxy resin which is characterized as being a gel in the uncured state at room temperature. The use of the alpha-staged epoxy resin, in contrast with the conventional beta-staged epoxy resin, results in an airtight cavity being formed without punctures or fissures in the epoxy resin. The method also provides a two-step heating process whereby the epoxy resin is cured at a first elevated temperature in the open atmosphere and further cured and stabilized at a second elevated temperature in a closed environment.
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Kim Jong Tae
Lee Chang Hyung
Park Chau Ik
Borsari Peter A.
Chaudhuri Olik
Turner Kevin F.
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