Method of making an acoustically coupled transformer

Details Method of making an acoustically coupled transformer Method of making an acoustically coupled transformer

2008-05-06

2008-05-06

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S602100, C029S831000, C029S846000, C310S320000, C333S189000

Reexamination Certificate

active

11404403

ABSTRACT:
Embodiments of an acoustically-coupled transformer have a first stacked bulk acoustic resonator (SBAR) and a second SBAR. Each of the SBARs has a lower film bulk acoustic resonator (FBAR) and an upper FBAR, and an acoustic decoupler between the FBARs. The upper FBAR is stacked atop the lower FBAR. Each FBAR has opposed planar electrodes and a piezoelectric element between the electrodes. The piezoelectric element is characterized by a c-axis. The c-axes of the piezoelectric elements of the lower FBARs are opposite in direction, and the c-axes of the piezoelectric elements of the upper FBARs are opposite in direction. The transformer additionally has a first electrical circuit connecting the lower FBAR of the first SBAR to the lower FBAR of the second SBAR, and a second electrical circuit connecting the upper FBAR of the first SBAR to the upper FBARs of the second SBAR.

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