Method of making an acceleration sensor

Details Method of making an acceleration sensor Method of making an acceleration sensor

1995-04-25

1996-08-20

Hall, Carl E.

Metal working

Piezoelectric device making

29 2542, 73493, H01L 4122

Patent

active

055466443

ABSTRACT:
A semiconductor type acceleration sensor comprises a flexible printed circuit board on which a semiconductor type detector chip section is mounted. The detector chip is formed with openings therethrough overlapping an opening formed in a rear-side base plate of the flexible printed circuit board such that the detector chip section is supported only by a bridge portion. In case of excess input in an acceleration direction, elastic deformation of the bridge portion and a bending portion of the flexible printed circuit board provide absorption of the excess input for protecting the detector chip section.

REFERENCES:
patent: 4700973 (1987-10-01), Gademann et al.
patent: 4829822 (1989-05-01), Imai et al.
patent: 5233873 (1993-08-01), Mozgowiec et al.
patent: 5239871 (1993-08-01), Reidmeister et al.
patent: 5335544 (1994-09-01), Wagner et al.

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