Method of making a vertical cavity laser

Details Method of making a vertical cavity laser Method of making a vertical cavity laser

1996-11-27

1999-03-02

Dutton, Brian

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Mesa formation

H01L 2100

Patent

active

058770380

ABSTRACT:
A highly controllable, compact method for making a vertical cavity laser. By using selective etching and contact layers within the laser cavity, higher efficiencies and lower power requirements for vertical cavity surface emitting lasers (VCSELs) are achieved.

REFERENCES:
patent: 5045499 (1991-09-01), Nishizawa et al.
patent: 5082799 (1992-01-01), Holmstrom et al.
patent: 5293392 (1994-03-01), Shieh et al.
patent: 5358880 (1994-10-01), Lebby et al.
patent: 5416044 (1995-05-01), Chino et al.
patent: 5568504 (1996-10-01), Kock et al.

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