Method of making a VCSEL

Details Method of making a VCSEL Method of making a VCSEL

1994-11-29

1995-11-21

Picardat, Kevin M.

Fishing, trapping, and vermin destroying

437126, 437129, 437133, H01L 21265

Patent

active

054686563

ABSTRACT:
A substrate with a surface, the surface having disposed thereon a first stack of distributed Bragg reflectors, an active area, a second stack of distributed Bragg reflectors, a contact region, and a dielectric layer is provided. A first isolation trench is formed that extends through the dielectric layer, the contact region, and into a portion of the second stack of distributed Bragg reflectors. A dielectric layer is disposed on the substrate. A second isolation trench is formed through the nitride layer, the contact region, the second stack of distributed Bragg reflectors, the active region and a portion of the first stack of distributed Bragg reflectors, wherein the second isolation trench encircles the first isolation trench. A first electrical contact is formed on the second stack of distributed Bragg reflectors and a second electrical contact is formed on the contact region.

REFERENCES:
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patent: 5256596 (1993-10-01), Ackley et al.
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patent: 5317587 (1994-05-01), Ackley et al.
patent: 5341002 (1994-08-01), Plumb
patent: 5387543 (1995-02-01), Ackley
patent: 5388120 (1995-02-01), Ackley et al.

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