Method of making a variable-capacitance diode device

Details Method of making a variable-capacitance diode device Method of making a variable-capacitance diode device

1988-08-17

1989-09-19

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437904, 437919, 437933, 437956, 148DIG171, 357 14, H01L 2993

Patent

active

048681342

ABSTRACT:
A method of making a variable-capacitance diode device including semiconductor layer a first conductivity type in which the impurity concentration decreases with increasing depth from surface of a PN junction. The semiconductor layer of the first conductivity type is formed by diffusing an impurity element of the first conductivity type in a semiconductor substrate with a high degree of concentration. Thereafter, a semiconductor layer of a second conductivity type is formed which has such an impurity concentration profile that the concentration of impurity element of the second conductivity type is lower than the impurity concentration of said semiconductor layer of the first conductivity type formed in said semiconductor substrate and at a predetermined depth, the concentration of the second conductivity type impurity element is substantially equal or close to the concentration of the first conductivity type impurity element. Subsequent to the formation of the first conductivity type semiconductor layer, an impurity element of the second conductivity type is diffused so as to define said PN junction with said first conductivity type semiconductor layer.

REFERENCES:
patent: 3581164 (1971-05-01), Pfander
patent: 3764415 (1973-10-01), Raabe et al.
patent: 3840306 (1974-10-01), Raabe et al.
patent: 3897276 (1975-07-01), Kondo
patent: 4475117 (1984-10-01), Raabe

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