Method of making a transformer for monolithic microwave integrat

Metal working – Method of mechanical manufacture – Electrical device making

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296021, 336200, 427116, H01F 4106

Patent

active

054251672

ABSTRACT:
A passive transformer which can be formed in an MMIC having a plurality of first-layer wirings formed on a substrate so that each of the first-layer wirings intersects a desired virtual line on the substrate; an insulating film for covering a substrate surface on which the first-layer wirings are formed; and a plurality of second-layer wirings formed on the insulating film so that each of the second-layer wirings intersects the virtual line and has opposite ends respectively connected to different ends of the first-layer wirings through contact holes. An inductor element having a spiral structure along the virtual line constitutes the first-layer wirings the contact holes and the second-layer wirings. The opposite ends of the inductor element are primary electrodes, and one end and a desired intermediate point of the inductor element are secondary electrodes. Because the transformer has such a structure, a three-dimensional coil can be formed on the substrate so that the transformer can be formed in an MMIC.

REFERENCES:
patent: 3290758 (1966-12-01), Moyer
patent: 3561110 (1971-02-01), Feulner et al.
patent: 3992691 (1976-11-01), Molthen
patent: 4253231 (1981-03-01), Nouet

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