Method of making a thin film magnetic head having multi-layer co

Details Method of making a thin film magnetic head having multi-layer co Method of making a thin film magnetic head having multi-layer co

1993-03-10

1995-09-12

Hall, Carl E.

Metal working

Method of mechanical manufacture

Electrical device making

427116, 430324, 430326, G11B 542

Patent

active

054488222

ABSTRACT:
A method of making a thin film magnetic head having multi-layer coils wherein a raised insulative photoresist spiral pattern having undercut sidewalls is formed. Two layers of coils are fabricated simultaneously by evaporating metal onto the upper surface of the spiral pattern and in spaces between the pattern. The cross-section of the bottom coil decreases in width with an increase in height. The coils are insulated from each other with a layer of insulative photoresist.

REFERENCES:
patent: 3685144 (1972-08-01), Trimble
patent: 4684438 (1987-08-01), Lazzari
Holger Moritz, IEEE Transactions on Electron Devices, vol. ED-32, No. 3, Mar. 1985, 672-676, "Optical Single Layer Lift-Off Process".
M. Hatzakis et al., IBM J. Res. Develop., 24(4), Jul., 1980, 452-460, "Single-Step Optical Lift-Off Process".
M. Spak, et al., As presented at: Seventh International Technical Conference on Photopolymers, Ellenville, N.Y., "Mechanism and Lithographic Evaluation of Image Reversal in AZ 5214 Photoresist".

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