Method of making a thin-film magnetic head having a multi-layere

Electric heating – Metal heating – By arc

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360110, 360126, 360125, 29603, 20419234, B23K 900, G11B 5127, G11B 5147, H01F 706

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048048160

ABSTRACT:
A method of making a thin-film magnetic head having a multi-turn structure includes forming a lower magnetic layer on a substrate, and successively forming a first insulating layer and a first conductive layer over the lower magnetic layer. Then, a first coil patterned mask is formed on the first conductive layer, and an ion beam is applied onto a structure formed by the foregoing steps. The ion beam simultaneously etches the first insulating layer and first conductive layer so that a first coil patterned double-layer is formed. Then, a second insulating layer is formed followed by an upper magnetic layer, over the first coil patterned double-layer. Thus, a magnetic gap is formed between the lower and upper magnetic layers defined by the thickness of the second insulating layer.

REFERENCES:
patent: 4281357 (1981-07-01), Lee
patent: 4489357 (1984-12-01), Van Doijen et al.
IEEE Trans. on Magnetics, vol. Mag-15, No. 3, May 1979, pp. 1060-1064, "Narrow Track Mag. Head Fab. by Ion-Etching Method" by Nakanishi et al.
IEEE Trans. on Magnetics, vol. Mag-15, No. 6, Nov. 1979, pp. 1616-1618, "Fabrication of 8 Turn Multi-Track Thin Films Heads" by Hanazono et al.
IEEE Trans. Magnetics, vol. Mag. 15, No. 6, Nov. 1979, pp. 1637-1639, "Mag. Head Fab. by Improved Ion Etching Method" by Toshima et al.
IEEE Trans. on Magnetics, vol. Mag.-15, No. 6, Nov. 1979, pp. 1648-1650, "Toward a Single-Mask Processing of Ion-Implanted Bubble Devices" by Ahn et al.
IEEE Transactions on Magnetics, vol. Mag. 16, No. 5, Sep. 1980, pp. 785-787, "Floating Thin Film Head Fabrication by Ion Etching Method" by Nakanishi et al.
National Technical Report vol. 26, No. 6, Dec. 1980, pp. 949-956, "Thin Film Magnetic Heads for Digital Audio Tape Recorder" by Nomura et al.

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