Metal working – Method of mechanical manufacture – Electrical device making
Patent
1997-10-20
1999-02-09
Dombroske, George
Metal working
Method of mechanical manufacture
Electrical device making
296211, 73727, 338 42, G01R 300, G01L 906
Patent
active
058678867
ABSTRACT:
A media-compatible, high-pressure transducer cell (12), a rugged sensor assembly (10) incorporating the cell (12), and a method for its production. The pressure cell (12) generally includes a metal body having a diaphragm (26), at least one dielectric layer (28, 38) on the diaphragm (26), and at least one thick-film piezoresistive element (34) on the dielectric layer (28, 38) for sensing deflection of the diaphragm (26). For purposes of compatibility with a wide variety of media, the metal body is preferably formed of steel, most preferably a stainless steel alloy such as an AISI Type 300 or 400 Series. The diaphragm (26) can be formed by etching or machining the metal body. The dielectric layers (28, 38) are preferably formed by thick-film processing as done for the piezoresistive element (34), employing materials that will adhere to the metal diaphragm (26), withstand the strains induced as the diaphragm (26) deflects, and faithfully transmit such strains to the thick-film piezoresistor (34).
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Hart, Jr. John Marcus
Ratell Joseph Martin
Delco Electronics Corp.
Dombroske George
Felber Joseph L.
Funke Jimmy L.
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