Method of making a surface acoustic wave device

Details Method of making a surface acoustic wave device Method of making a surface acoustic wave device

1993-11-29

1994-10-18

Hall, Carl E.

Metal working

Piezoelectric device making

310313R, 427100, H01L 4122

Patent

active

053555686

ABSTRACT:
A surface acoustic wave device having a diamond layer, a piezoelectric layer and a comb-like electrode, in which the piezoelectric layer and the comb-like electrode are formed on a surface of the diamond layer, which surface has been contacted to a substrate used in the formation of the diamond layer by a vapor phase growth method, which device has high stability and can be produced economically.

REFERENCES:
patent: 4025954 (1977-05-01), Bert
patent: 4817102 (1989-03-01), Maurer et al.
patent: 4952832 (1990-08-01), Imai et al.
patent: 4978879 (1990-12-01), Satoh et al.
patent: 5061870 (1991-10-01), Ioki et al.
patent: 5160869 (1992-11-01), Nakahata et al.

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