Optical: systems and elements – Mirror – With support
Patent
1996-07-25
1998-07-21
Dzierzynski, Paul M.
Optical: systems and elements
Mirror
With support
359872, 359883, 359295, 359224, 359291, 359214, 359292, 359293, G02B 7182, G02B 2600, G02B 2608, H01L 4104
Patent
active
057842124
ABSTRACT:
A support pillar 426 for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material 422 supported by a substrate 400 and covered with a metal layer 406. The support pillar 426 is fabricated by depositing a layer of pillar material on a substrate 400, patterning the pillar layer to define a support pillar 426, and depositing a metal layer 406 over the support pillar 426 enclosing the support pillar. A planar surface even with the top of the pillar may be created by applying a spacer layer 432 over the pillars 426. After applying the spacer layer 432, holes 434 are patterned into the spacer layer to remove any spacer material that is covering the pillars. The spacer layer is then reflowed to fill the holes and lower the surface of the spacer layer such that the surface is coplanar with the tops of the support pillars 426.
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Brill Charles A.
Donaldson Richard L.
Dzierzynski Paul M.
Kesterson James C.
Sikd-er Mohammad Y.
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