Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Coating
Patent
1995-06-07
2000-05-02
King, Roy V.
Superconductor technology: apparatus, material, process
Processes of producing or treating high temperature...
Coating
H01L 3924, C23C 1434
Patent
active
06057271&
ABSTRACT:
A microwave component includes a single dielectric layer, and one pair of conductor layers formed on opposite surfaces of the dielectric layer, respectively, one of the pair of conductor layers forming a ground conductor, and the other of the pair of conductor layers being shaped in a predetermined pattern. The pair of conductor layers are respectively formed of oxide superconductor material layers which are deposited by off-axis sputtering on the opposite surfaces of the dielectric layer, respectively, and which have little defect.
REFERENCES:
Braggins et al, Adv. Cryog. Eng., 38(Pt.B) 1992, pp. 1013-1018.
Hedges et al, Electron. Lett., 27(25) 1991, pp. 2312-2313.
Hideo Itozaki
Kenjiro Higaki
Saburo Tanaka
Shuji Yazu
King Roy V.
Sumitomo Electric Industries Ltd.
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