Method of making a superconducting microwave component by off-ax

Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Coating

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H01L 3924, C23C 1434

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06057271&

ABSTRACT:
A microwave component includes a single dielectric layer, and one pair of conductor layers formed on opposite surfaces of the dielectric layer, respectively, one of the pair of conductor layers forming a ground conductor, and the other of the pair of conductor layers being shaped in a predetermined pattern. The pair of conductor layers are respectively formed of oxide superconductor material layers which are deposited by off-axis sputtering on the opposite surfaces of the dielectric layer, respectively, and which have little defect.

REFERENCES:
Braggins et al, Adv. Cryog. Eng., 38(Pt.B) 1992, pp. 1013-1018.
Hedges et al, Electron. Lett., 27(25) 1991, pp. 2312-2313.

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