Method of making a substrate of a ceramic material

Details Method of making a substrate of a ceramic material Method of making a substrate of a ceramic material

1996-07-17

1997-06-03

Group, Karl

Compositions: ceramic

Ceramic compositions

Carbide or oxycarbide containing

501 984, C04B 3556, C04B 35581

Patent

active

056354290

ABSTRACT:
The invention relates to a substrate made from a novel type of ceramic material. This material comprises 44-47 at. % A1, 31-39 at. % O, 8-13 at. % C and 8-12 at. % N. Substrates made from this material exhibit a relatively high heat conductance, a relatively great strength and their coefficient of expansion is equal to that of Si. Consequently, the substrates in accordance with the invention are very suitable for use in the Si-semiconductor technology. The main component of the ceramic material of the substrates preferably corresponds to the formula Al.sub.28 O.sub.21 C.sub.6 N.sub.6. The invention also provides methods of manufacturing substrates and other mouldings from this material.

REFERENCES:
patent: 4320203 (1982-03-01), Brandt et al.
patent: 5023212 (1991-06-01), Dubots et al.
patent: 5075265 (1991-12-01), Narula

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