Fishing – trapping – and vermin destroying
Patent
1992-12-04
1994-02-01
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437189, 437195, H01L 21465
Patent
active
052832082
ABSTRACT:
The invention relates to a method of making a local structure from an organic mandrel on a substrate at the submicrometer level. The mandrel is formed from an organic layer deposited on the substrate. The mandrel is then removed by exposure to an oxygen plasma environment, thus leaving a cavity. A local structure material is deposited into the cavity and polished to form the local structure. In the preferred method of the invention, an electrically conducting, local interconnect is formed from a polyimide mandrel on a wafer used to make integrated circuits.
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Lorsung Michael J.
Mathison Connie J.
Chaudhuri Olik
Dillon Andrew J.
Firestone Susan L.
International Business Machines - Corporation
Tsai H. Jey
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