Method of making a stacked semiconductor nonvolatile memory devi

Details Method of making a stacked semiconductor nonvolatile memory devi Method of making a stacked semiconductor nonvolatile memory devi

1992-04-28

1994-03-01

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437979, 437985, H01L 21266

Patent

active

052907210

ABSTRACT:
This invention is directed to a process for the fabrication of a stacked semiconductor nonvolatile memory device, which process is adapted to define a longitudinal length of a floating gate in self-alignment with overlying control gate and interlayer insulating film by etching, without severely damaging the underlying semiconductor substrate.

REFERENCES:
patent: 3996657 (1976-12-01), Simko et al.
patent: 5087584 (1992-02-01), Wada et al.
patent: 5091327 (1992-02-01), Bergemont
patent: 5102814 (1992-04-01), Woo
patent: 5120670 (1992-06-01), Bergmont

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