Method of making a stacked capacitor dram cell

Details Method of making a stacked capacitor dram cell Method of making a stacked capacitor dram cell

1990-10-24

1993-03-23

Thomas, Tom

Fishing, trapping, and vermin destroying

437 47, 437 48, 437 60, 437919, H01L 2170

Patent

active

051963647

ABSTRACT:
A stacked multi-fingered cell (SMFC) capacitor using a modified stacked capacitor storage cell fabrication process. The (SMFC) is made up of polysilicon structure, having a multi-fingered cross-section, located at a buried contact and extending to an adjacent storage node overlaid by polysilicon with a dielectric sandwiched in between. The addition of the polysilicon structure increases storage capability 120% without enlarging the surface area defined for a normal stacked capacitor cell.

REFERENCES:
patent: 4977102 (1990-12-01), Ema
patent: 5071783 (1991-12-01), Ema

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