Method of making a stable high voltage semiconductor device stru

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Field plate electrode

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H01L21/76

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active

059045442

ABSTRACT:
A power integrated circuit device with multiple guard rings and field plates overlying regions between each of the guard rings. Each of the field plates form overlying a dielectric layer also between each of the guard rings. Multiple field plates can exist between each of such guard rings. At least one field plate couples to a main junction region, and another field plate couples to a peripheral region, typically a scribe line. The present power device structure with multiple guard rings and field plates provides a resulting guard ring structure which allows for such device to achieve higher voltage applications.

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