Method of making a solid state imager with reduced smear

Details Method of making a solid state imager with reduced smear Method of making a solid state imager with reduced smear

1995-06-07

1998-06-09

Nguyen, Tuan H.

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

438 57, 438 69, 438 78, 438 98, H01L 2100

Patent

active

057632928

ABSTRACT:
A CCD solid state imaging device can reduce a smear component. This CCD solid state imaging device comprises a plurality of photosensor sections (10) arranged in a matrix fashion, a vertical transfer register (5) having a transfer electrode (16) disposed at every column of the photosensor sections, a shunt line layer (33) connected to the transfer electrode (16) on the vertical transfer register (5), and a photo-shield layer (38) formed so as to surround the photosensor section 10 through an interlayer insulating layer (37) which covers the shunt layer (33), in which the interlayer insulating layer (37) is formed under an overhang portion (38a) of the photo-shield layer (38) to the photosensor section (10).

REFERENCES:
patent: 5264374 (1993-11-01), Watanabe et al.
patent: 5385849 (1995-01-01), Nakashiba
patent: 5492852 (1996-02-01), Minami

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