Method of making a solid state electromagnetic radiation detecto

Details Method of making a solid state electromagnetic radiation detecto Method of making a solid state electromagnetic radiation detecto

1992-05-05

1993-12-28

Quach, T. N.

Fishing, trapping, and vermin destroying

437 2, 437 5, 437 49, 437195, H01L 21283, H01L 21335

Patent

active

052739104

ABSTRACT:
The present invention provides a large area, high pixel density solid state radiation detector with a real-time and a non-destructive read-out. The solid state detector comprises a plurality of field effect transistors deposited onto a substrate to form an array. A planarization layer is deposited over the array of transistors. An energy sensitive layer is deposited onto the planarization layer. Means is provided for electrically connecting the energy sensitive layer with each transistor of the array. A top electrode layer is deposited onto the energy sensitive layer. The solid state detector also comprises circuitry means for providing electronic read-out from each FET of the array.

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