Method of making a smooth silica glass body

Details Method of making a smooth silica glass body Method of making a smooth silica glass body

1987-09-14

1988-09-06

Kellogg, Arthur

Glass manufacturing

Processes

Reshaping or surface deformation of glass preform

65 992, 65 3012, 65113, 65900, C03B 1802

Patent

active

047690585

ABSTRACT:
Silica glass having a substantially smooth, planar surface is formed by floating sintered silica glass on a molten metallic bath. The molten metallic bath is maintained at a sufficiently high temperature to heat-polish the sintered silica glass surface which is in thermal contact with the bath to form a substantially smooth, planar surface. A method for producing silica glass includes floating sintered silica glass on a molten metallic bath to provide the sintered glass with a substantially smooth surface. The resultant silica glass has many applications, but has particular utility for semiconductor substrates, integrated circuit masks, and other electronic applications.

REFERENCES:
patent: 3915720 (1975-10-01), Tarcza
patent: 4046545 (1977-09-01), Sanford et al.
patent: 4380463 (1983-04-01), Matesa
patent: 4462816 (1984-07-01), Wolfe et al.

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