Method of making a semiconductor device with surge current...

Details Method of making a semiconductor device with surge current... Method of making a semiconductor device with surge current...

2011-06-14

2011-06-14

Landau, Matthew C (Department: 2813)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Making emissive array

C438S029000, C438S031000, C438S035000, C438S039000, C438S042000, C438S045000, C438S046000, C438S571000, C438S572000, C257S409000, C257S452000, C257S484000, C257S594000, C257SE33054, C257SE31099

Reexamination Certificate

active

07960198

ABSTRACT:
A wide bandgap semiconductor device with surge current protection and a method of making the device are described. The device comprises a low doped n-type region formed by plasma etching through the first epitaxial layer grown on a heavily doped n-type substrate and a plurality of heavily doped p-type regions formed by plasma etching through the second epitaxial layer grown on the first epitaxial layer. Ohmic contacts are formed on p-type regions and on the backside of the n-type substrate. Schottky contacts are formed on the top surface of the n-type region. At normal operating conditions, the current in the device flows through the Schottky contacts. The device, however, is capable of withstanding extremely high current densities due to conductivity modulation caused by minority carrier injection from p-type regions.

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