Method of making a semiconductor device including infrared imagi

Details Method of making a semiconductor device including infrared imagi Method of making a semiconductor device including infrared imagi

1993-03-30

1995-03-07

Fields, Carolyn E.

Radiant energy

Infrared-to-visible imaging

250332, 2503581, 374 5, 437 8, G01N 2572

Patent

active

053960688

ABSTRACT:
The inventive methods of making a semiconductor device, e.g., a laser, comprise thermal (e.g., 3-5 .mu.m wavelength) imaging of a powered, partially completed device. The thermal image is obtained with apparatus that is capable of forming a substantially diffraction-limited image on a sensor array with an acquisition time of no more than 0.1 seconds, preferable no more than 0.01 seconds. In preferred embodiments, the image has temperature resolution of 0.01.degree. C. or better. Exemplary apparatus is disclosed. The inventive method facilitates, for instance, early identification of devices that are likely to fail lifetime requirements.

REFERENCES:
patent: 4466746 (1984-08-01), Hancock et al.
patent: 5294198 (1994-03-01), Schlagheck
patent: 5302830 (1994-04-01), Shivanandan
Woolaway, "New Sensor Technology for the 3-5 .mu.m Imaging Band", Photonics Spectra, Feb. 1991, pp. 113-119.
Masi, "What can Thermal Imaging Do For You", Test & Measurement World, May 1988.
Weight, "Thermography Testing of Production PC Boards", Electronic Packaging & Production, Oct. 1981, pp. 69-74.
"Imager Finds Microelectronic Hot Spots", by R. J. Stetson et al., Laser Focus World, Jun. 1990.
"Thermal Resistance of Heterostructure Lasers", by W. B. Joyce et al., Journal of Applied Physics, vol. 46, No. 2, Feb. 1975, pp. 855-862.

Affiliated with

Also associated with

Rating

Method of making a semiconductor device including infrared imagi does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making a semiconductor device including infrared imagi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making a semiconductor device including infrared imagi will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1407815