Stock material or miscellaneous articles – All metal or with adjacent metals – Having member which crosses the plane of another member
Patent
1996-01-16
1998-11-24
Bowers, Jr., Charles L.
Stock material or miscellaneous articles
All metal or with adjacent metals
Having member which crosses the plane of another member
438599, 438622, 438624, 438645, 438646, 438697, H01L 2144
Patent
active
058406190
ABSTRACT:
An object of the present invention is to completely reduce a difference in level in a short time at a convex pattern spreading horizontally on a large scale and obtain a semiconductor device having a planarized surface. An insulating film is formed on a semiconductor substrate to cover a horizontally spreading convex pattern and to fill in a concave portion. A portion of insulating film located on a planarized portion of convex pattern is selectively etched away so as to leave a frame-shaped insulating film having a width of 1-500 .mu.m at least on the outer periphery portion of convex pattern. Insulating film left on semiconductor substrate is etched by chemical/mechanical polishing method, thereby planarizing a surface of the semiconductor substrate.
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Bowers Jr. Charles L.
Gurley Lynne A.
Mitsubishi Denki & Kabushiki Kaisha
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