Method of making a selective epitaxial growth circuit load eleme

Details Method of making a selective epitaxial growth circuit load eleme Method of making a selective epitaxial growth circuit load eleme

1996-10-23

1998-09-08

Dutton, Brian

Semiconductor device manufacturing: process

Making conductivity modulation device

438380, 438675, H01L 2120, H01L 2144

Patent

active

058044701

ABSTRACT:
A method of manufacturing a polysilicon plug in an integrated circuit semiconductor device wherein the polysilicon plug is selectively doped to act as a resistive load or alternatively to act as a diode load. The polysilicon load can be used in an SRAM memory cell.

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