Method of making a scalable fuse link element

Details Method of making a scalable fuse link element Method of making a scalable fuse link element

1989-05-25

1991-05-21

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437189, 437922, 148DIG55, 357 71, H01L 2148

Patent

active

050175106

ABSTRACT:
A fuse link (50) is formed using a method which offers greater scalability of the general conductor system used to wire the device. An oxide mask (36) having the shape of a desired fuse link is formed over a thin metallization layer (34). A barrier layer (38) is formed over the thin metallization layer (34). A conductive layer (40) is formed over the barrier layer (38). A photoresist mask (42) supplied to the conductive layer (40), and the conductive layer is etched to formed interconnects (44, 46). Subsequently, the barrier layer (38) and thin metallization layer (34) are etched, thus rendering a fuse link (50) between interconnects (44, 46) under the oxide mask (36).

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