Method of making a residual gas sensor utilizing a miniature qua

Details Method of making a residual gas sensor utilizing a miniature qua Method of making a residual gas sensor utilizing a miniature qua

1995-03-24

1997-03-25

Vo, Peter

Metal working

Method of mechanical manufacture

Electrical device making

29595, 29842, 29855, 250281, H01R 4300

Patent

active

056132948

ABSTRACT:
The present invention provides a method of manufacturing a gas sensor having multiple quadrupoles formed in an array by positioning a plurality of rods in an array of quadrupoles, forming a glass bead on the rods, positioning a source of electrons proximate to one end of the rods to ionize gas molecules, positioning an electrical lens proximate to the source of electrons to induce ionized gas molecules, positioning a collector proximate to the rods and displaced from the lens to receive the ionized gas molecules, providing electrical connections through the glass bead to the source of electrons, to the lens, to the collector and to the rods, and heating the glass beads formed on a plurality of rods positioned in the array of quadrupoles to grip and hold the rods in a cantilevered position to thereby seal the electrical connections.

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German article entitled "Das elektrische Massenfilter als Massenspektrometer und Isotopentrenner", by W. Paul, H.P. Reinhard and U. von Zahn; Apr. 21, 1958.
Brochure for QZ200.RTM. Residual Gas Analyzers "Residual Gas Analysis, PPM Analysis, Multiplexing", from Leybold Inficon Inc.

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