Glass manufacturing – Processes – Reshaping or surface deformation of glass preform
Patent
1995-05-26
1996-11-12
Czaja, Donald E.
Glass manufacturing
Processes
Reshaping or surface deformation of glass preform
65 71, 65106, 65107, 65109, 65111, 65120, 65256, 65271, 65273, 65285, 65287, 65289, 65290, 65291, 65302, 425110, 425111, 425112, 425117, C03B 23023
Patent
active
055735665
ABSTRACT:
A method of making a quartz dome for a reactor chamber from a substantially flat quartz disk. The quartz disk is placed on a graphite ring which is rotated. The quartz disk is heated until the disk is softened slightly and it begins to slump. The softened portion of the disk is drawn by a change in pressure to contact a fixed wiper blade. The wiper blade controls the size and shape of the deformation of the quartz disk to form the dome surface.
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Anderberg Dane H.
Barnett Lewis C.
Advanced Semiconductor Materials America, Inc.
Colaianni Michael Philip
Czaja Donald E.
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