Plastic and nonmetallic article shaping or treating: processes – Pore forming in situ – By mechanically introducing gas into material
Patent
1994-04-07
1996-06-11
Simmons, David A.
Plastic and nonmetallic article shaping or treating: processes
Pore forming in situ
By mechanically introducing gas into material
156 89, 156233, 264 61, 264 62, 264 65, 264 66, 73718, 73724, 3612834, B32B 3112, B32B 3126, C04B 3332, G01L 912
Patent
active
055252800
ABSTRACT:
A monolithic capacitive pressure transducer is shown composed of ceramic material having a closed cavity formed near a surface thereof and having capacitor plates formed on two opposed surfaces defining the cavity. Vias are formed extending from the capacitor plates to permit electrical connection therewith. The transducer is made by separately forming under pressure a diaphragm and a base having a recess in the top surface using ceramic powder coated with an organic binder. A metal layer is deposited on the two pieces and the pieces are then joined together to form a single unit. A spacer may be inserted in the recess to ensure that a predetermined gap is maintained between the two parts during the joining operation. The parts are then debinderized by heating in air to a first temperature level to allow the binder organics, as well as the spacer organics if a spacer is employed, to be vaporized and/or decomposed and removed through the open pores of the diaphragm and base. The unit is then brought up to a sintering temperature in a reducing atmosphere to change it into a monolithic body and to convert the metallized layer into a conductive layer bonded to the ceramic.
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Lukasiewicz Stanley J.
Padovani Francois A.
Shukla Vishwa N.
Baumann Russell E.
Donaldson Richard L.
Grossman Rene E.
Mayes M. Curtis
Simmons David A.
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