Metal working – Piezoelectric device making
Patent
1997-04-02
1999-07-06
Hall, Carl E.
Metal working
Piezoelectric device making
2281241, 2281801, 228206, 228220, 310312, 310340, 427100, 4272551, H01L 4122
Patent
active
059183543
ABSTRACT:
A piezoelectric resonator is provided which is formed of an element piece. This element piece further includes a piezoelectric material and an electrode formed on the surface of the piezoelectric material. A plug for mounting the element piece and a case for housing said element piece in an air-tight manner are also provided. The surface of the element piece is coated with a resin film formed from an excited active species of an organic compound generated through a gas discharge in a predetermined discharge gas at approximately atmospheric pressure. A method of manufacturing a piezoelectric resonator is also provided, which comprises the steps of first mounting the element piece on the plug. Next, a gas discharge in a predetermined discharge gas is produced at approximately atmospheric pressure and an excited active species of an organic compound which is a liquid or a gas at room temperature is generated as a result of this gas discharge in a gas discharge region. Next, the surface of the element piece is exposed to the excited active species and a resin film covering the surface of the element piece is formed.
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Ikegami Yasumitsu
Miyakawa Takuya
Hall Carl E.
Seiko Epson Corporation
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