Method of making a piezoelectric device

Details Method of making a piezoelectric device Method of making a piezoelectric device

2011-06-07

2011-06-07

Talbot, Brian K (Department: 1715)

Coating processes

Electrical product produced

Piezoelectric properties

C029S025350, C427S537000

Reexamination Certificate

active

07955641

ABSTRACT:
A method of forming a piezoelectric device is disclosed. In one such method, a coating material is formed. The coating material has a piezoelectric precursor. The coating material is applied to a first electrode. The precursor is heated to a temperature that is above the Curie temperature of the precursor, but below the melting temperature of the precursor. While the precursor is above its Curie temperature, a voltage is applied across the precursor. While the voltage is applied across the precursor, the temperature of the precursor is reduced to below the Curie temperature.

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Schwartz; Chemical Solution Deposition of Perovskite Thin Films; Chem. Mater., 1997, vol. 9; pp. 2325-2340.
Yi, et al.; An Acetic Acid/Water Based Sol-Gel PZT Process I: Modification of Zr and Ti Alkoxides with Acetic Acid; Journal of Sol-Gel Science and Technology, 1996, vol. 6; pp. 65-74.

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