Method of making a photoelectric conversion device

Details Method of making a photoelectric conversion device Method of making a photoelectric conversion device

1990-04-25

1991-01-29

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437916, 437 2, 437 3, 357 19, 357 237, 357 2, 357 29, 357 30, H01L 2714, H01L 2712

Patent

active

049886312

ABSTRACT:
The present invention, in a photoelectric conversion device including a sensor portion and a thin film transistor portion for the purpose of switching disposed on the same substrate, is manufactured by, first, forming gate electrodes for a thin film transistor portion on the surface of the substrate by a thin film technique, and then, depositing an insulating film, an a-Si film, and electrodes on the insulating substrate so as to be laminated to one after another and commonly covering the sensor portion and the thin film transistor portion, whereby the sensor portion and the thin film transistor portion are enabled to be provided in one series of processing while the device is put in a vacuum chamber.

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