Method of making a photodetector array having high pixel density

Details Method of making a photodetector array having high pixel density Method of making a photodetector array having high pixel density

1993-06-18

1994-07-12

Thomas, Tom

Fishing, trapping, and vermin destroying

437 5, 437185, 437232, 437905, 148DIG50, 148DIG107, H01L 3118

Patent

active

053288530

ABSTRACT:
Photoconductive semiconductor material is injected into narrow and closely paced cylindrical channels in an insulating matrix plate to form pixel elements of a high resolution photodetector array. A transparent conductive layer is deposited on one surface of the photoconductor array while light reflecting pads are formed on the elements at the opposite surface. Subsequently, a layer of light modulating material and a transparent conductive layer are deposited on the opposite surface to obtain a high resolution spatial light modulator.

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