Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2006-04-11
2006-04-11
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603150, C029S603160, C029S603180, C216S022000, C216S048000, C216S052000, C204S192340, C204S192200
Reexamination Certificate
active
07024756
ABSTRACT:
The method of making a magnetic head assembly includes forming a second pole piece layer that is recessed from a head surface, forming a reactive ion etchable (RIEable) pole tip forming layer on the second pole piece layer, forming an adhesion/stop layer of tantalum (Ta) on the pole tip forming layer, forming a photoresist mask on the adhesion/stop layer with an opening for patterning the adhesion/stop layer and the pole tip forming layer with another opening, reactive ion etching (RIE) through the opening to form the other opening, forming the second pole piece pole tip in the other opening with a top which is above a top of the adhesion/stop layer and chemical mechanical polishing (CMP) the top of the second pole piece pole tip until the CMP contacts the adhesion/stop layer. The invention also includes the magnetic head made by such a process.
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Le Quang
Li Jui-lung
Lille Jeffrey S.
Nguyen Son Van
Hitachi Global Storage Technologies - Netherlands B.V.
Law Offices of Imam
Tugbang A. Dexter
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