Method of making a perovskite thin-film ink jet transducer

Details Method of making a perovskite thin-film ink jet transducer Method of making a perovskite thin-film ink jet transducer

1994-06-13

1996-03-26

Hall, Carl E.

Metal working

Piezoelectric device making

298901, 427100, 347 68, H01L 4122

Patent

active

055009883

ABSTRACT:
In the particular embodiments described in the specification, a thin-film PZT piezoelectric transducer ink jet head is prepared by oxidizing one surface of a silicon wafer to provide a dielectric layer, forming electrodes on the layer by photoresist processing techniques, depositing one or more layers of perovskite-seeded PZT material to provide a thin-film piezoelectric layer having a thickness in the range of 1-25 microns, forming another pattern of electrodes on the surface of the PZT layer by photoresist techniques, and selectively etching the silicon substrate in the region of the electrodes to provide an ink chamber. Thereafter, an orifice plate is affixed to the substrate to enclose the ink chambers and provide an ink orifice for each of the chambers. An ink jet head having chambers 3.34 mm long by 0.17 mm wide by 0.15 mm deep and orifices spaced by 0.305 mm is provided.

REFERENCES:
patent: 4584590 (1986-04-01), Fischbeck
patent: 4680595 (1987-07-01), Cruz-Uribe
patent: 5202703 (1993-04-01), Hoisington
patent: 5265315 (1993-11-01), Hoisington
Yi et al., "Preparation of Pb(Zr,Ti)O.sub.3 thin films by sol gel processing: Electrical, optical, and electro-optic properties", Journal of Applied Physics, vol. 64, No. 5, pp. 2717-2724 (Sep. 1, 1988).
Zaghete et al., "Phase Characterization of Lead Zirconate Titanate Obtained from Organic Solutions of Citrates", Journal of the American Ceramic Society, vol. 75, No. 8, pp. 2088-2093 (Aug. 1992).

Affiliated with

Also associated with

Rating

Method of making a perovskite thin-film ink jet transducer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making a perovskite thin-film ink jet transducer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making a perovskite thin-film ink jet transducer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-909256